For the analysis of thin films. with high aspect ratio (HAR) structures. time-of-flight secondary ion mass spectrometry (ToF-SIMS) overcomes several challenges in comparison to other frequently used techniques such as electron microscopy. The research presented herein focuses on two different kinds of HAR structures that represent different semiconductor technologies. https://www.roneverhart.com/90557208-Guard-Right-Side-Black-Decker-Trimmer-NST2018-Type-8/